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動力機械工程學系
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【書報討論】108/11/28 Prof. Kiyoshi Takamasu, Department of Precision Engineering, the University of Tokyo, Japan
演講時間:108/11/28(四)15:30-17:00 演講地點:國立清華大學工程一館107演講廳 演講者:Prof. Kiyoshi Takamasu, Department of Precision Engineering, the University of Tokyo, Japan 講題:Research Projects for Nanometer Profile Measurement and Uncertainty Estimation 演講摘要:The problem of profile measurement for a wide range of objects can be understood from the concept of scale factor. The scale factor is the ratio of the effective scale of measurement range to the measurement accuracy. In manufacturing, the scale factor deteriorates because the profile accuracy of the measurement object is poor, two- and three-dimensional profile measurement is required, and complex profiles are the object. In order to improve these problems, intelligent precision measurement methods such as measurement standards, data processing such as self-calibration, and estimation of measurement uncertainty are required. As an example of intelligent precision measurement, the following profile measurement and dimension measurement are explained. 1. Nanometer Measurement for Semiconductor Industry 2. Profile and Coordinate Measurement with Uncertainty Estimation 3. Absolute Length Measurement using Optical-Comb
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